JPH064301Y2 - 半導体圧力センサ - Google Patents
半導体圧力センサInfo
- Publication number
- JPH064301Y2 JPH064301Y2 JP1987122671U JP12267187U JPH064301Y2 JP H064301 Y2 JPH064301 Y2 JP H064301Y2 JP 1987122671 U JP1987122671 U JP 1987122671U JP 12267187 U JP12267187 U JP 12267187U JP H064301 Y2 JPH064301 Y2 JP H064301Y2
- Authority
- JP
- Japan
- Prior art keywords
- sensor chip
- semiconductor substrate
- semiconductor
- thermal expansion
- glass layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000004065 semiconductor Substances 0.000 title claims description 68
- 239000000758 substrate Substances 0.000 claims description 44
- 239000011521 glass Substances 0.000 claims description 35
- 239000002184 metal Substances 0.000 claims description 13
- 229910052751 metal Inorganic materials 0.000 claims description 13
- 239000000463 material Substances 0.000 claims description 12
- 239000013078 crystal Substances 0.000 claims description 6
- 238000005259 measurement Methods 0.000 description 9
- 230000008646 thermal stress Effects 0.000 description 3
- RZVAJINKPMORJF-UHFFFAOYSA-N Acetaminophen Chemical compound CC(=O)NC1=CC=C(O)C=C1 RZVAJINKPMORJF-UHFFFAOYSA-N 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000005297 pyrex Substances 0.000 description 2
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987122671U JPH064301Y2 (ja) | 1987-08-11 | 1987-08-11 | 半導体圧力センサ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987122671U JPH064301Y2 (ja) | 1987-08-11 | 1987-08-11 | 半導体圧力センサ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6427635U JPS6427635U (en]) | 1989-02-17 |
| JPH064301Y2 true JPH064301Y2 (ja) | 1994-02-02 |
Family
ID=31370817
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987122671U Expired - Lifetime JPH064301Y2 (ja) | 1987-08-11 | 1987-08-11 | 半導体圧力センサ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH064301Y2 (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015007626A (ja) * | 2013-06-19 | 2015-01-15 | ハネウェル・インターナショナル・インコーポレーテッド | シリコン応力隔離部材を有する統合ｓｏｉ圧力センサ |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7476695B2 (en) | 2004-03-16 | 2009-01-13 | Nissan Chemical Industries, Ltd. | Modified stannic oxide-zirconium oxide complex sol and method for preparing same |
| JP4683618B2 (ja) * | 2005-02-10 | 2011-05-18 | キヤノンアネルバ株式会社 | 隔膜型圧力センサ及びその製造方法 |
| US8371175B2 (en) * | 2009-10-01 | 2013-02-12 | Rosemount Inc. | Pressure transmitter with pressure sensor mount |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5441304B2 (en]) * | 1974-01-25 | 1979-12-07 | ||
| JPS54138384A (en) * | 1978-04-19 | 1979-10-26 | Mitsubishi Electric Corp | Semiconductor pressure converter |
| JPS57171235A (en) * | 1981-04-15 | 1982-10-21 | Toshiba Corp | Semiconductor pressure converter |
-
1987
- 1987-08-11 JP JP1987122671U patent/JPH064301Y2/ja not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015007626A (ja) * | 2013-06-19 | 2015-01-15 | ハネウェル・インターナショナル・インコーポレーテッド | シリコン応力隔離部材を有する統合ｓｏｉ圧力センサ |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6427635U (en]) | 1989-02-17 |
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